What IS RECLAIM
Silicon wafer reclaim is a multi-step process that is used to convert a used wafer into a functioning test wafer. These test wafers offer similar performance as a virgin test wafer at a much lower cost.
Lower your cost. Reclaim is typically less than 1/3 to 1/4 the cost of new prime wafers and most wafers can be reclaimed several times for additional cost savings.
How Reclaim is used
The primary application for reclaim wafers is to diagnose process conditions of the equipment used in semiconductor manufacturing.
Reclaim Wafer Process Flow.
Order acceptance and documentation control takes place initially to ensure incoming spec review and to segregate wafer lots
The customer supplied wafers are inspected using various equipment. We verify that the mechanical properties of the wafers are suitable to achieve the clients finished specifications
We use a chemical process to remove any existing materials from the surface of the wafers
We use a two-step polish process beginning with removal of stock. This step focuses on surface planarization to remove scratches, pits and surface defects.
Stage two of our polishing step is our finished polish. This is a minimum removal, final polish step that buffs the wafers and removes haze.
Our RCA clean uses a mixture of chemistries that include SC-1 and SC-2 processes. We include a megasonic cleaning step to achieve reduced surface metals and particle contamination.
A quality inspection is performed using automated metrology equipment and recorded for customer compliance.
Wafers are securely transferred into cleaned cassettes; the cassettes are double bagged and individually labeled.
Tier I provides a Certificate of Conformance for each lot processed in our facility. A Certificate of Analysis is provided to validate the quality of the product.
2” | 50.8 mm 3” | 76.2 mm 4” | 100 mm 5” | 125 mm 6” | 150 mm 8” | 200 mm 12”| 300 mm