METAL

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FILMS

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Tantalum (Ta)

Tantalum Nitride (TaN)

Copper Seed (Cu)

Titanium (Ti)

Titanium Nitride (TiN)

Aluminum (Al)

Cobalt (Co)

Ruthenium (Ru)

Others include: Al-Si-Cu, Al-Cu, Al-Si, Ni, TiW, W, WN, WSi, & Cr.